Sputtering by particle bombardment: experiments and computer by Rainer Behrisch, Wolfgang Eckstein

By Rainer Behrisch, Wolfgang Eckstein

This quantity offers a finished review in regards to the actual techniques inflicting sputtering of solids at bombardment with full of life ions. an important amounts are the sputtering yields, i.e. the typical variety of atoms eroded consistent with incident ion. the newest effects for the sputtering yields and their dependence at the incident power and perspective of occurrence, in addition to the strength and angular distributions of the sputtered atoms are provided. This issues experimentally decided yields in addition to a serious review of the computational tools used to calculate the yields and distributions. The energies of the incident ions conceal the variety among a number of eV as much as numerous MeV. The impact of chemical results among the incident ions and the atoms of the bombarded good at the sputtering yields also are reviewed.

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Extra info for Sputtering by particle bombardment: experiments and computer calculations from threshold to MeV energies

Example text

However, if the cluster impinges on an inclined surface, the crater rim becomes asymmetric: the ‘uphill’ motion is impeded, while in the ‘downhill direction’ the crater rim is free to develop. As a result, a net atom transport downhill exists. Since one can consider such an inclined surface as part of a rough surface, the net downhill atom motion serves to decrease the slope and hence the large-scale surface roughness. The same paper shows that good quantitative agreement with corresponding experiments exists.

In principle, also the surface curvature may influence the sputtering yield. The incorporation of such effects is well possible within analytical sputter theory [188, 189] and does not require modelling on a molecular-dynamics basis. Note, however, the study by Moseler et al. [132] discussed in Sect. 3 on surface smoothing of a rippled surface by cluster beams. Atomistically rough surfaces, on the other hand, are well suited for a study by molecular-dynamics simulation. In one particular study [190], a Pt (111) surface was randomly covered with a definite coverage Θ of adatoms.

Analytical sputter theory [46] predicts δ to depend on the masses Mi,j and the surface binding energies Ui,j of the respective species in the alloy as δ= Mj Mi 2m Uj Ui 1−2m . (3) Here m denotes the power exponent describing the interaction potential. The sputtering of such a system is of considerable interest to SIMS. The static SIMS case corresponds to low fluences, Φ → 0, while the interpretation of dynamic SIMS data needs (among others) a knowledge of the dependence of the partial sputtering yields on fluence Φ.

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