Helium Ion Microscopy by Gregor Hlawacek, Armin Gölzhäuser

By Gregor Hlawacek, Armin Gölzhäuser

This e-book covers the basics of Helium Ion Microscopy (HIM) together with the gasoline box Ion resource (GFIS), column and distinction formation. It additionally presents first hand details on nanofabrication and excessive answer imaging. correct theoretical versions and the prevailing simulation methods are mentioned in an additional part. The constitution of the ebook permits the amateur to get accustomed to the specifics of the strategy had to comprehend the extra utilized chapters within the moment 1/2 the quantity. The specialist reader will discover a whole reference of the procedure overlaying all vital purposes in numerous chapters written by means of the major specialists within the box. This comprises imaging of organic samples, face up to and precursor established nanofabrication, functions in semiconductor undefined, utilizing Helium in addition to Neon and lots of extra. the elemental half permits the usual HIM consumer to deepen his knowing of the tactic. a last bankruptcy by means of invoice Ward, one of many pioneers of HIM, masking the ancient advancements resulting in the prevailing device enhances the content.

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Example text

1, then the SNR rule of thumb would suggest that 250 incident ions are required per pixel. The dependence of areal dosage, σ, on the field of view, FOV, is expressed as: 1 The Helium Ion Microscope 23 Fig. 13 Lines corresponding to a fixed number of incident ions per pixel, are graphed on axes representing the FOV (horizontal axis), and the areal dosage (vertical axis) σ= Ni . FOV 2 ð1:11Þ The general scaling of this relation is shown in Fig. 13. 10) we can arrive at a form which is arguably more important to the microscopist: σ=   ðSNRÞ2 1 1 + .

The tip was cooled by a flow-though liquid helium cryostat reaching ∼12 K at the coldest point and ∼20 K at the tip. Both temperatures were measured independently by a thermocouple to determine precise tip temperature. The positive tip and extractor voltages were controlled and monitored by computer. The FIM pattern was amplified by a Hamamatsu microchannel plate (MCP) and displayed on a phosphor screen. The input stage of the MCP was grounded, while the output was typically biased at +900 to +1200 V to achieve desirable gain.

Notte and J. Huang Fig. 2 The integrated dewar which provides a temperature of 75–80 K at the GFIS gun operated at atmospheric pressure, the heat load drives the nitrogen from point A to A′, thereby involving significant boiling and achieving a temperature of only 78 K at the bottom of the dewar. When operated at a vacuum level sustained at about 3 Torr, the same heat load drives the nitrogen from point B to B′, which involves only sublimation, a process which transfers no vibration to the GFIS gun.

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