Hazardous Gas Monitoring. A Guide for Semiconductor and by Logan T. White

By Logan T. White

  • "Overall, i feel that the booklet is a superb reference and advisorà " ù Paula Calabrese, Phoenix SSA Newsletter

Content:
Figures

, Page ix
Tables

, Page ix
Caveat

, Page x
Acknowledgements

, Page xi
Acronyms/abbreviations

, Page xii
1 - detrimental fuel Monitoring

, Pages 1-5
2 - Regulated Materials

, Pages 7-12
3 - precis of unsafe fuel tracking Codes

, Pages 13-80
4 - harmful fuel tracking Sensors

, Pages 81-116
5 - tracking, Alarm and regulate Systems

, Pages 117-148
6 - tracking Exhaust therapy method Discharge

, Pages 149-154
7 - process Certification

, Pages 155-158
8 - Code Enforcement

, Pages 159-162
Appendix A - harmful gases quite often monitored in semiconductor facilities

, Pages 163-166
Appendix B - Protocol for checking out poisonous gasoline Detectors

, Pages 167-176
Appendix C - 1995 complement to the UFC desk A-VI-A-1 — Normalization factor

, Pages 177-178
Appendix D - security approach suppliers

, Pages 179-184
Glossary

, Pages 185-193
References

, Pages 195-201
Index

, Pages 203-206

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Additional info for Hazardous Gas Monitoring. A Guide for Semiconductor and Other Hazardous Occupancies

Sample text

The Environmental Protection Agency (EPA) covers hazardous chemical releases in Title 40, Protection of Environment, Part 68 (40 CFR 68) Chemical Accident Prevention Provisions. 119 Process Safety Management of Highly Hazardous Chemicals. 120 Hazardous Waste Operations and Emergency Response could be applicable to wastes or to releases of hazardous materials. , EPA's list of chemicals includes 100 toxic substances, 51 of which are not included on OSHA's list. In addition, facilities that may not be required to meet OSHA requirements may fall under EPA requirements.

Semiconductor fabrication facilities classified as H-6 by previous editions of the UFC are classified as H-5 by the new International codes. Occupancies containing oxidizing gases classified as H-2 by previous editions of the UFC are now classified as H-3 by the International codes. Occupancies containing toxic and highly toxic materials classified as H-7 by previous editions of the UFC are now classified as H-4 by the International codes. The 2000 UFC Article 51 now refers to Group H Occupancies in lieu of H-6 Occupancies: HAZARDOUS GAS MONITORING 27 2000 UFC Group H Occupancies shaft include buildings or structures, or portions thereof that involve the manufacturing, processing, generation or storage of materials that constitute a high fire, explosion or health hazard.

1 0 Design and construction . . Readily accessible manual valves, or automatic remotely activated failsafe emergency shutoff valves shaft be installed on supply piping and tubing at the following locations: 3. 1 The point of use. 2 The tank, cylinder or bulk source. 3 covers shutoff valves for all quantities of flammable gases. 3 Emergency shutoff. Compressed gas systems conveying flammable gases shaft be provided with approved emergency shutoff valves that can be activated at each point of use and each source.

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